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Queuing-Based Performance Analytical Model for Continuous Flow Transporters of AMHS 被引量：2

Queuing-Based Performance Analytical Model for Continuous Flow Transporters of AMHS
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摘要 To quickly and accurately estimate the expected work-in-process (WIP)of material intersection points in continuous automated material handling systems (AMHSs) ,a queuing-based performance analytical model was presented for continuous flow transporters (CFTs) . In the modeling procedure which considered layout of crossovers and the variability of service time of turntables, an M /G /1 queuing model with multi-class customers and a non-preemptive priority M /G /1 queuing model with multi-class customers were introduced to accurately present the queuing WIP of each material intersection point and perform the analytical model. Finally,300 mm wafer fabrication facilities (fabs)with 24 bays were applied to evaluating the proposed model. Compared with results of an Arena simulation, the model performs well in evaluating the number of queuing WIP of the intersection points and overall system of CFTs in AMHSs. To quickly and accurately estimate the expected work-in-process （WIP）of material intersection points in continuous automated material handling systems （AMHSs） ,a queuing-based performance analytical model was presented for continuous flow transporters （CFTs） . In the modeling procedure which considered layout of crossovers and the variability of service time of turntables, an M /G /1 queuing model with multi-class customers and a non-preemptive priority M /G /1 queuing model with multi-class customers were introduced to accurately present the queuing WIP of each material intersection point and perform the analytical model. Finally,300 mm wafer fabrication facilities （fabs）with 24 bays were applied to evaluating the proposed model. Compared with results of an Arena simulation, the model performs well in evaluating the number of queuing WIP of the intersection points and overall system of CFTs in AMHSs.
作者 周炳海 陈锦祥
机构地区 School of Mechanical Engineering
出处 《Journal of Donghua University(English Edition)》 EI CAS 2013年第2期90-95,共6页 东华大学学报（英文版）
基金 National Natural Science Foundations of China(No.61273035,No.71071115) National High-Tech R&D Program for CIMS,China(No.2009AA043000)
关键词 自动化技术 元件 技术 CFTs wafer fabrications automated material handling system（ AMHS） queuing-based model continuous flow transports
分类号 TP29 [自动化与计算机技术—检测技术与自动化装置]
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参考文献14

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同被引文献15

  • 1JONATHAN D. 450 mm wafer transition needs collabo- ration and standards [J]. Solid State Technology, 2011, 54(6) : 14 - 17.
  • 2TOM J. ISMI 450 mm transition program update [J]. SEMICON Japan, 2008(12) : 12 - 13.
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  • 4ARDEZONNE F J. Handling the 450ram wafer with structural ceramics [J]. Solid State Technology, 2011, 54(7) .. 40 - 41.
  • 5EMRAH Z, ROBERT W, CHAD B, et al. Modeling semiconductor factories for equipment and cycle time re- duction opportunities [J]. Future Fab International, 2008, 24(4): 50-55.
  • 6BATARSEH O G, NAZZAL D, YAN W. An interval- based meta-modeling approach to simulate material han- dling in semiconductor wafer fabs [J]. IEEE Transac- tions on Semiconductor Manufacturing, 2010, 23 ( 4 ) : 527 - 537.
  • 7GOVIND N, ROEDER T M, SCHRUBEN L W. A simulation - based closed queuing network approxima- tion of semiconductor automated material handling sys- tems [J]. IEEE Transactions on Semiconductor Manufac- turing, 2011, 24(1): 5-13.
  • 8AGRAWAL G K, HERAGU S S. A survey of automa- ted material handling systems in 300-ram Semiconductor Fabs [J]. IEEE Transactions on Semiconductor Manufac- turing, 2006, 19(1): 112-120.
  • 9YAVUZ A B, YING J H. Throughput performance a- nalysis and machine layout for discrete-space closed-loop conveyors [J]. IIE Transactions, 2005, 37(1) : 77 - 89.
  • 10NAZZAL D, JOHNSON A. An analytical model for conveyor based AMHS in semiconductor wafer labs [C]// Proceedings of the 40th Conference on Winter Simulation. Miami: IEEE, 2008:2148-2155.

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Journal of Donghua University(English Edition)
2013年 第2期

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