非球面反馈补偿铣磨抛光及工艺参数优化

Feedback Compensation of Grinding and Polishing and Process Parameter Optimization for Aspheric Surfaces

通过对口径Φ84mm平凸非球面透镜加工工艺的研究,提出了全口径柔性抛光结合小磨头修正抛光的试验方案。通过实验引入铣磨补偿量来抵消全口径抛光带来的面型误差,并对小磨头修正抛光比较突出的工艺参数进行单因素试验,其中包括小磨头尺寸选择,抛光压力选择。通过改变抛光盘尺寸有效减少了中频误差,优化工艺流程参数后抛光的元件面型精度(PV值)0.49μm,达到中等精度要求。总结出一套效率高,成本低,重复性好的数控研抛非球面方法,可实现中小口径非球面元件大批量快速加工。

The technology of full-diameter-flexibly-polishing and small-grinding-tools-correcting-polishing is raised by processing a flat convex aspherical lenses which has a diameter of Φ84mm.And it offsets the surface profile error through the grinding’s compensation and making the single-factor experiment to the small-grinding-tools-correcting-polishing’s prominent technological parameters,including the small-tools size selection,polishing pressure selection.The mid-spatial-frequency error is reduced effectively by changing the size of the polishing tools.the precision of the component’s surface profile（PV） can reach 0.49μm after optimizing the process parameter.There fore,a high efficiency a low cost and good reproducibility,numerical control aspherical lapping method is summarized.This method can realize that the small and medium-caliber aspherical elements are processed rapaidly in large quantity.