硫化锌晶体加工工艺技术研究

Research on Processing Technology of ZnS Crystal

随着军用光学仪器飞速发展,红外光学材料硫化锌(ZnS)广泛应用于红外光学系统中,以Φ35mm的硫化锌晶体为例,对硫化锌晶体加工研磨的工艺过程进行了研究,探讨了硫化锌晶体的抛光技术。通过使用不同的抛光粉及抛光模层材料,找到了使用数控抛光加工硫化锌晶体的最佳工艺匹配条件,解决了硫化锌晶体表面光洁度难以控制的加工技术难题。经过轮廓检测仪和Zygo干涉仪检测,硫化锌晶体表面光洁度达到III级以上,非球面面型精度能够达到0.2μm,中心偏差小于1μm,各项参数均满足红外光学系统的要求。

So far,with the rapid development of military optical instruments,infrared（IR） optical material-ZnS was widely applied in IR optical systems.In this paper,the grinding process research of ZnS crystal is introduced and the polishing technique of ZnS crystal is discussd by processing a 35mm diametric ZnS crystal for example.By comparing various polishing powders and layer materials,the best craft matching condition is found in the numerical contrd polishing process of ZnS crystal.Besides that,the challenge of controlting the ZnS surface finish is also further solved.After being tested by profilometer and Zygo inter ferometer,the profile accuracy of ZnS-crystal aspheric surface can reach 0.2μm,the surface finish can achieve above the grade III and the deviation of the center is less than 1μm.All the parameters are met the requirements of an infrared tracking system.