应用激光光杠杆式原子力显微镜研究光学及超光滑表面微轮廓

Studying on Microprofile of Optical and Supersmooth Surface Using AFM with Laser Lever

论述了应用激光光杠杆式原子力显微镜 (AFM)研究光学和超光滑表面微轮廓的特点和优点 ,指出运用AFM方法可得出干涉法等其他方法不能得出的光学表面许多信息 ,是测试光学和超光滑表面形貌和微轮廓的一个重要的新发展。

Some characterizations and advantages on studying microprofile and roughness of optical and supersmooth surface using Atomic Force Microscope(AFM) with laser lever are presented in this paper.Authors indicated that many informations using AFM method are gained,but aren't gained by other methods,e.g.interferometer method.It is an important new development to test morphology and microprofile of optical and supersmooth surface.