摘要
Optical emission spectroscopy parallel to the axis of a low-pressure radio-frequency discharge in nitrogen was realized, i. e. end-on instead of customary side-on measurements. A specially designed optical feedthrough was fabricated and installed co-planar with the anode elec- trode, allowing non-invasive observations perpendicular to the plasma sheath. The principal ex- cited species flowing towards the grounded electrode were identified and, by assuming Boltzmann distributions, the vibrational temperature of the molecules on the X1 ∑＋/g and C3Ⅱu levels was estimated under various operating conditions.
Optical emission spectroscopy parallel to the axis of a low-pressure radio-frequency discharge in nitrogen was realized, i. e. end-on instead of customary side-on measurements. A specially designed optical feedthrough was fabricated and installed co-planar with the anode elec- trode, allowing non-invasive observations perpendicular to the plasma sheath. The principal ex- cited species flowing towards the grounded electrode were identified and, by assuming Boltzmann distributions, the vibrational temperature of the molecules on the X1 ∑＋/g and C3Ⅱu levels was estimated under various operating conditions.
