螺旋波激发甲烷等离子体光谱诊断(英文)

Spectrum diagnosis of the methane plasmaexcited by helicon-wave

利用螺旋波激发等离子体化学气相沉积(LPP-CVD)技术,以甲烷和氦气为反应气体产生等离子体.通过采集到甲烷的可见光到紫外发射光谱,对甲烷等离子体进行原位诊断,发现存在CH、Hα及Hβ等碎片粒子的光辐射,同时,分析了不同入射功率、气压下CH粒子以及Hβ、Hγ的相对强度变化情况.结果表明:CH粒子的相对强度随着射频功率是先增大而后减小,随工作气压的增大而逐渐减小;随气压及功率的增加,Hβ、Hγ相对强度变化的总体趋势都是先增加而后减小的.

The methane-helium plasma was excited by using the technology of helicon-wave plasma chemical vapor deposition（HWP-CVD）.we systematically studied the physical properties of the methane plasma by using the vacuum visible emission spectroscopy and found some fragment particles such as CH 、Hα、Hβ etc.Furthermore,in the CH4-He system,the relative intensities of the CH particle、Hβ and Hγ vary with different parameters such as radio power and air pressure and so on.The experimental results indicated that the relative intensities of the CH particle、Hβ and Hγ primarily increase and then decrease as the input power,and that the relative intensity of the CH particle decreases but that of Hβ and Hγ initially increase and then decrease with the increase of the air pressure.