基于厚度剪切振动的压电圆盘微陀螺的制作和分析

Fabrication and analysis of piezoelectric disk micro gyroscope based on thickness-shear vibration

基于面内振动模态工作的圆盘陀螺在利用压电方式驱动和检测时,需要在圆盘振动体侧壁上加工压电换能器,很难由MEMS工艺实现。为实现压电圆盘陀螺的小型化,设计制作了一种直接由压电材料作为振动体,基于厚度剪切振动模态工作的新型压电圆盘微陀螺。厚度剪切振动模态使得陀螺可以通过在压电基片上下表面制作金属电极的MEMS工艺进行加工。通过对加工出的陀螺器件进行阻抗分析发现加工出的陀螺具有良好的对称性,基于阻抗分析得到的品质因数通过有限元分析可知,陀螺可实现高灵敏度、低非线性度、大量程、低角速度耦合误差等性能。

Because difficulties of piezoelectric transducer fabricating on the sidewall of the disk resonator,the piezoelectric disk gyroscopes based on in-plane vibration modes can hardly be fabricated with MEMS technology.To achieve miniaturization of piezoelectric disc gyroscope,a novel piezoelectric disk micro gyroscope with piezoelectric vibration body and based on thickness-shear vibration mode is designed and fabricated.The thickness-shear vibration modes make it easy to fabricate the sensor with MEMS technology by fabricating metal electrodes on the top and bottom surface of the piezoelectric wafer.The fabricated gyroscope is found to have good symmetry by impendence analysis.Based on finite element analysis on quality factor obtained by impendence analysis,the simulation results show that the gyroscope can achieve characteristics such as high sensitivity,low nonlinearity,large range and low angular rate coupling error.