摘要
微位移测量是目前热点研究领域,光纤布拉格光栅作为良好的传感元件,已被用于微位移测量领域。本文首先对布拉格光纤光栅传感的基本原理进行了分析,在此基础上设计制作了一种光纤光栅位移传感器。采用布拉格光纤光栅作为传感元件,利用自解调法进行波长解调,然后设计一整套传感系统,对微位移量进行了传感测量。利用激光干涉仪和PI微动平台对系统性能进行测试,实验结果显示传感系统分辨率达到50nm,系统回零重复性的误差26nm,系统的灵敏度为21mV/μm,最大非线性引用误差为2.45%。
Micro/nano precision measuring technology is representative of the research field,optical fiber Bragg grating as a good original sensor has been used to the micro/nano measurement field with broad prospects.The basic principle of displacement sensing was analyzed and based on this a kind of fiber Bragg grating was designed.Thereafter,by using one fiber Bragg grating as displacement sensor and self-demodulation method to demodulate the wavelength shift,a set of system was devised to measure micro-displacement.Besides,the system was testified by laser interferometers and PI micro-displacement on system performance test,the experimental results show this set of system＇ s sensor the minimum systematic resolution is 50 nm,the repeatability of the system back to zero error for 26nm,the system sensitivity 21 mV/μm,the maximum nonlinear reference error is 2.45％.
出处
《工具技术》
2013年第8期61-65,共5页
Tool Engineering
基金
国家科技重大专项(2011ZX04014-071)
国家自然科学基金(51205103)
关键词
布拉格光纤光栅
微位移测量
自解调法
fiber Bragg grating
micro displacement measurement
self-demodulation
