微机械电子学—机械电子学的新发展

MICROMECHANTRONICS—AN ADVANCE OF MECHANTRONICS

综述了机械电子学的新发展,即近年来出现的微机械电子学;介绍了如何利用 IC(集成电路)的微细加工技术制造微型机构、微型执行器等,以及微机械电子学产品的应用前景.

This paper is involved about the advance of mechantronics,that is microme-chantronics arised in the recent years,and how to use the microprocess manufacture technologyof the IC(integrated circuit)for manufacturing micromechanisms,microactuators and etc.aswell as the furture potential of micromechantronics application.