摘要
综述了机械电子学的新发展,即近年来出现的微机械电子学;介绍了如何利用 IC(集成电路)的微细加工技术制造微型机构、微型执行器等,以及微机械电子学产品的应用前景.
This paper is involved about the advance of mechantronics,that is microme-chantronics arised in the recent years,and how to use the microprocess manufacture technologyof the IC(integrated circuit)for manufacturing micromechanisms,microactuators and etc.aswell as the furture potential of micromechantronics application.
出处
《电子科技大学学报》
EI
CAS
CSCD
北大核心
1991年第3期311-315,共5页
Journal of University of Electronic Science and Technology of China
关键词
机械电子学
微细加工
微机械电子学
mechanics
electronics
mechantronics
micromechantronics
microprocess technique