基于线扫描相位差分成像的光学元件激光损伤快速检测技术

Technology for Rapid Detection of Laser-Induced Damage on Optical Components Using Line-Scan Phase Differential Imaging

将暗场照明应用到线扫描成像中,提出了一种用于光学元件激光损伤的检测技术。该技术基于相位差分原理,只对引起相位变化的激光损伤区域有响应,因此检测图像具有高对比度。分析了该技术的原理,并从实验上验证了该检测技术的特性。实验研究表明该技术能够获得高对比度和高分辨率的激光损伤图像,且具有快速检测大口径光学元件激光损伤的能力。

A technology for detecting laser-induced damage on optics, using line-scan imaging and dark-field image principle, is proposed. According to the phase differential theory, this technology only responds to laser-induced damages which cause the phase change, and thus the detected images have high contrast. In order to understand the features of the technology, the principle of the technology is analyzed, and the characteristics of the detection technology are verified by experiment. Experimental studies reveal that the technology can acquire high contrast and high-resolution laser-induced damage image, and that it has the potential to quickly detect the laser-induced damage of large aperture optical components.