摘要
采用脉冲激光沉积薄膜技术(PLD)制备了LiCoO2薄膜,研究了氧压、衬底、靶与底衬的距离对LiCoO2薄膜结构、化学组成的影响.
LiCoO2 thin film was prepared by pulsed laser deposition film technology （PLD）. The effect of oxygen pressure, target, content of Li in target, distance between target and substrate on structure and chemical composition of LiCoO2 thin film were studied.
出处
《南开大学学报（自然科学版）》
CAS
CSCD
北大核心
2013年第2期6-10,共5页
Acta Scientiarum Naturalium Universitatis Nankaiensis
基金
国家863项目(2011AA11A234)
NSFC(51272175)
教育部新世纪优秀人才支持计划(NCET-10-0952)
关键词
全固态锂电池
LiCoO2薄膜
固态电解质
界面
PLD
all-solid-state lithium batteries ~ LiCo02 thin film~ solid state electrolyte ~ interface ~ PLD
