摘要
CVD金刚石膜材料具有优异的力、热、声、光、电学等性质并由于尺寸可控从而弥补了天然金刚石在尺寸、杂质方面的应用限制,因而具有广阔的发展前景。结合当前金刚石膜应用发展中遇到的技术及经济问题,从金刚石膜产品质量的提高及生产成本的控制两方面讨论了CVD金刚石膜在今后大规模产业化应用中应注意的细节。在提高金刚石膜产品质量上,应努力缩短与国外厂家在CVD设备设计及制造方面的差距,提高金刚石膜材料的机械强度以及增强金刚石膜与衬底材料间的结合力;在控制金刚石膜产品价格上,可通过循环利用反应气体,改进反应腔结构,合理调配功率等手段降低生产成本以增强CVD金刚石膜的市场竞争力。今后应针对金刚石膜材料的光学、声学、化学、电学以及生物学等领域不断开发更广泛的新用途。
CVD diamond film material has many excellent properties including mechanics, thermotics, acoustics, optics, electricity, etc. In addition CVD technology can make up the application restricts of natural diamond caused by crystal size and impurities, thus it has vast development prospects in future. Combined with the Technical and economic problems in current application of CVD diamond film, some details which should be valued were discussed in future industrial application, including the quality improvement and production cost controlling. At first, design and manufacturing method level should be promoted to reduce the gap between us and foreign manufacturers, then, mechanical strength and the adhesive force between diamond film and substrate material should be pay more attention to. Moreover, reaction gases recycling, substrates and microwave power regulating are also worth noted. In the future, new application should be continually developed based on the outstanding physicochemical property of CVD diamond film.
出处
《硬质合金》
CAS
2013年第4期230-236,共7页
Cemented Carbides
关键词
金刚石膜
化学气相沉积
质量
成本
diamond film
chemical vapor deposition （CVD）
quality
production cost
