多晶硅生产副产物SiCl_4合成高纯石英玻璃的方法

The Method of Synthesizing High Purity Fused Silica with By-product Tetrachloride Silicon from Polysilicon in Production

针对国内多晶硅生产副产物四氯化硅的消化处理,通过对多晶硅生产尾气冷凝液主要成分三氯氢硅和四氯化硅等组分和杂质的含量分析,提出了利用多晶硅生产副产物四氯化硅合成高纯石英玻璃的方法及其工艺条件.通过分析四氯化硅合成高纯石英玻璃的影响因素,针对性地提出了生产控制方法.对高纯石英玻璃材料的理化性能及应用进行了探讨,为多晶硅行业资源综合利用及增效减排,提供了切实可行的途径.

In view of a series of after treatment issues regarding to by-product tetrachloride silicon which is from the production of domestic polysilicon, an analysis is made in the respect of the content of trichlorosilane and tetrachloride as well as the content of impurity in the main components in tail gas condensate liquid in polysilicon production,. In this paper, the method of synthesizing high purity fused silica by tetrachloride silicon and its process conditions is put forward, factors influencing synthesizing high purity fused silica is stated, an effective production control method is raised, and analysis and evaluation to the physicochemical performance of high purity fused silica and its application is well discussed. A feasible way of comprehensive utilization of resources is provided to save energy and reduce pollution discharge.