多元统计分析软件包(MSA)及其在IC工艺决策中的应用

The Multivariated Statistical Analysis(MSA) Software Package and its Applications in IC Process Decision Making

本文说明了IC生产工艺的随机性及其给工艺控制和决策带来的困难。介绍了多元统计分析(MSA)软件包及其基本原理。用MSA软件包对23个参数的100组测试数据进行了分析,表明MsA软件包是分析IC生产线的工艺数据的有力工具,它可以从大量的测试数据中迅速、准确地找出工艺参数与器件参数或电路参数之间的联系及工艺中存在的关键问题,从而帮助工艺人员作出优化生产工艺的决策。

The stochastic nature of the IC fabrication process and the resulting difficulties in the process control are described. The multivariated statistical analysis (MSA) software package and its fundamental principles are presented. The data generated from 100 sets of test and for 23 parameters are analyzed with this MSA package. It shows that the MSA package is a powerful tool for analyzing the process data in IC production line. The relations between the process parameters and the device or circuit parameters from a great quantity of test data can be rapidly and accurately found out, and the key problems in fabrication process as well. It helps the technologists to make dicision on the optimization of fabrication process.