关于提高扫描电镜图像成像质量的研究

Research on Improving the Image Quality of SEM Image

主要从仪器参数、操作方法、样品制备、装置本身及安装环境等方面分析了各个参数对扫描电镜成像质量的影响。重点分析加速电压、束斑尺寸、物镜光阑和工作距离等观察参数对成像的影响，总结了提高扫描电镜用于精密合金观察的成像质量的方法。

The effects of various parameters on scanning electron microscope（SEM） imaging quality had been studied mainly from the instrument parameters, operation methods, sample preparation, apparatus itself and installation environment. The influence of the accelerating voltage, spot size, lens aperture and work distance on imaging was discussed. The method had been summarized for imaging quality of alloy observation by SEM.