电致发光器件衬底透镜微结构纳米热压印制备的研究

Fabrication of organic light-emitting diode substrate microlens arrays using hot nanoimprinting technology

采用纳米压印技术在OLED器件衬底上制备可传递三维立体透镜微结构,可有效减小波导、增加出光耦合,从而有望增加器件出光效率。采用紫外曝光与湿法腐蚀技术相结合的方法来制备高精度的石英玻璃纳米压印模板,对模板进行清洗与抗黏连处理。结果表明:所形成的透镜微结构具有平整度好、压印精度高的特点;此种方法制备微结构工艺简单易行,可大面积实现,工艺可操作性、重复性好。

In order to increase the optical efficiency, transferable three-dimensional lens micro-structure which can reduce optical waveguide and increase light out-coupling was fabricated on the substrate using hot nanoimprinting technology. High-precision glass template for UV nanoimprinting was fabricated by combining UV exposure and wet etching technology; c｜eaning and anti- adhension treatment were used. The result shows that the lens micro- structures are characterized by good flatness, high nanoimprinting precision, likeliness to achieve a large area, to operate and to be reproducible.