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多场载荷作用下FCBGA焊点的电迁移失效研究 被引量:3

RESEARCH OF ELECTROMIGRATION FAILURE FOR FCBGA SOLDER JOINT IN MULTI-PHYSICAL FIELD
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摘要 基于有限元法,结合子模型技术对倒装芯片球栅阵列封装(FCBGA)进行电-热-结构耦合分析,获得关键焊点的电流密度分布、温度分布和应力分布,采用原子通量散度法(AFD)和原子密度积分法(ADI)对关键焊点的电迁移(EM)特性及影响因素进行研究。结合焊点电迁移失效的SEM图,发现综合考虑电子风力、应力梯度、温度梯度以及原子密度梯度四种电迁移驱动机制的原子密度积分法能比较准确地预测焊点的电迁移失效位置,原子密度梯度(化学势)通常会延缓电迁移现象。 Based on FEM and submodel technique, the electric-thermal-structural coupled analysis for flip chip ball grid array (FCBGA) package is performed to obtain the distribution of current density, temperature and stress for the key solder joint. By using atomic flux divergence (AFD) method and atomic density integral (ADI) method, the electromigration (EM) characteristics and influence factors of the key solder joint are studied. The SEM image of the key solder joint under EM demonstrates that the ADI method with the consideration of four driving mechanisms, such as electron wind force, stress gradient, temperature gradient and atomic density gradient, can effectively predict the EM failure location. The atomic density gradient (chemical potential) usually can retard EM phenomenon.
出处 《工程力学》 EI CSCD 北大核心 2013年第9期264-269,共6页 Engineering Mechanics
基金 浙江省自然科学基金项目(Y6110641)
关键词 微电子封装 电迁移 FCBGA 多物理场分析 互连焊点 microelectronic packaging electromigration FCBGA multi-physical field analysis solder joints
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参考文献15

  • 1Tu K N. Recent advances on electromigration in very-large-scale-integration of interconnects [J]. Journal of Applied Physics, 2003, 94 (9): 5451-5473.
  • 2Liang S W, Chen Chih, Han J K, Xu L H, Tu K N. Blocking hillock and whisker growth by intermetallic compound formation in Sn-0.7Cu flip chip solder joints under electromigration [J]. Journal of Applied Physics, 2010. 107(9): 093715.
  • 3张金松,奚弘甲,吴懿平,吴丰顺.Cu-Ni/Solder/Ni-Cu互连结构的电迁移[J].Journal of Semiconductors,2008,29(1):174-178. 被引量:4
  • 4杨艳,尹立孟,马骁,张新平.电迁移致SnAgCu微焊点强度退化及尺寸效应研究[J].电子元件与材料,2010,29(2):70-73. 被引量:8
  • 5常红,李明雨.电迁移对Sn3.0Ag0.5Cu无铅焊点剪切强度的影响[J].电子元件与材料,2011,30(2):29-31. 被引量:8
  • 6Dalleau D, Weide-Zaage K. Three-dimensional voids simulation in chip metallization structures: a contribution to reliability evaluation [J]. Microelectronics Reliability, 2001, 41(9/10): 1625- 1630.
  • 7Liu Y, Liang L H, Irving S, Luk T. 3D Modeling of electromigration combined with thermal-mechanical effect for IC device and package [J]. Microelectronics Reliability, 2008, 48 (6): 811-824.
  • 8Tan C M, Hou Y J, Li W. Revisit to the finite element modeling of electromigration for narrow interconnects [J]. Journal of Applied Physics, 2007, 102(3): 127.
  • 9梁利华,张元祥,刘勇,陈雪凡.金属互连结构的电迁移失效分析新算法[J].固体力学学报,2010,31(2):164-172. 被引量:12
  • 10Liang L H, Zhang Y X, Liu Y. Prediction of electromigration failure of solder joints and its sensitivity analysis [J]. Journal of Electronic Packaging, 2011, 133(3): 031002.

二级参考文献85

共引文献22

同被引文献29

  • 1刘静,吴振宇,汪家友,杨银堂.铜互连电迁移可靠性的研究进展[J].微电子学,2007,37(3):364-368. 被引量:7
  • 2KIM J M, JEONG M H, YOO S, et al. Effects of surface finishes and current stressing on interfacM reaction characteristics of Sn-3.0Ag-0.5Cu solder bumps [J]. J Electron Mater, 2012, 41(4): 791-799.
  • 3TU K N. Recent advances on electromigralion in very large scale integration of interconnects [J]. J Appl Phys, 2003, 94(9): 5451-5473.
  • 4LIANG S W, CHEN C, HAN J K, et al. Blocking hillock and whisker growth by intemletallic compound fonnation in Sn-0.7 Cu flip chip solder joints under electromigration [J]. J Appl Phys, 2010, 107(9): 093715.
  • 5KUO K H, LEE J, CHEN S, et al. Electromigration performance of printed Sn0.7Cu bumps with immersion tin surface finishing for flip chip applications [C]//Electronic Components and Technology Conference (ECTC). San Diego, USA: IEEE, 2012: 698-702.
  • 6DARVEAUX R, ENAYET S, REICHMAN C, et al. Crack initiation and growth in WLCSP solder joints [C]//Elecironic Components and Technology Conference (ECTC). Lake Buena Vista, USA: IEEE, 2011: 940-953.
  • 7LIANG L H, ZHANG Y X, LIU Y. Prediction of electromigration failure of solder joints and its sensitivity analysis [J]. J Electron Packg, 2011, 133(3): 031002.
  • 8ZHANG J S, XI H J, WU Y P, et al. Thenaaomechanical stress and strain in solder joints during electromigration [J]. J Electron Mater, 2009, 38(5): 678-684.
  • 9CHAO B, CHAE S H, ZHANG X, et al. Investigation of diffusion and eleetromigration parameters for Cu-Sn intermetallic compounds in Pb-ffee solders using simulated annealing [J]. Acta Mater, 2007, 55(8): 2805-2814.
  • 10LU M, SHIH D Y, GOLDSMITH C, et al. Comparison of electromigration behaviors of SnAg and SnCu solders [C]//Reliability Physics Symposium. Montreal, Canada: IEEE, 2009: 149-154.

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