摘要
激光直写是一种适用于衍射光学器件及掩模加工的方法。利用声光调制器对曝光功率进行精确控制对所制作器件的性能是至关重要的。首先描述了声光调制器的迟滞现象及其对曝光后掩模表面图形的不良影响。基于这一分析 ,提出了一种方法来克服声光调制器迟滞现象所带来的问题。简述了此项技术的设计原理和实现。
Laser direct writing is a suitable method for processing diffractive optical elements and mask.Controlling exposure power by means of acousto optic modulator is critical for the performances of the fabricated devices.The delay of acousto optic modulator and its harmful effect on patterns of mask surface are first described.Based on the above analysis,we propose a method to overcome the problems brought by delay of acousto optic modulator.The design principle and implementation of this technology are described in brief.The fabricated mask sample patterns in practice show the effectiveness of the described method.
出处
《光电工程》
CAS
CSCD
2000年第6期69-72,共4页
Opto-Electronic Engineering
基金
国家自然科学基金资助项目!(6 978980 3)
关键词
激光直写系统
声光调制器
光刻
迟滞
Laser direct writing system
Acousto optical modulators
Lithography
Delay