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TiO_2/SiO_2一维光子晶体的制备及其光子带隙特性 被引量:1

Preparation and Photonic Band Gap Properties of TiO_2/SiO_2 1-D Photonic Crystal
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摘要 以普通载玻片为基体,采用溶胶-凝胶法制备了 TiO2/ SiO2 一维光子晶体,对该结构的截面形貌、各层厚度及结晶形态、反射谱特性进行了分析。 结果表明:TiO2 和 SiO2 膜的平均厚度分别为 69 nm 和 83 nm,结晶形态分别为锐钛矿和无定形态;该结构在波长 544 nm 处的反射率达到了 94% ,且其 FWHM = 194 nm(486 - 680nm) 。 运用传输矩阵法对该结构进行仿真计算,得到的计算结果与测试结果趋于一致。 最后讨论了入射角对一维光子晶体反射谱的影响。 The one dimension (l-D) photonic crystal was prepared by using the sol-gel technology and dip-coating method on glass substrate. Morphology of cross section and thickness of each layer, properties of reflection spectrum were respectively examined. The results show that the thickness values of titania layers and silica layers are respectively 69 nm and 83 nm, the crystalline types of them are anatase and amorphous silica. The structure fabricated has the maximum reflectance of 0.94 for the wave length 544 nm and full width at half maximum of the main reflectance peak of FWHM = 194 nm(486 - 680 nm). the 1-D photonic crystal is calculated with the transfer matrix method, and the calculation resuhs have a good agreement with experimental results. Finally the effect of incidence angle on reflection spectrum of 1-D photonie crystal was discussed.
出处 《表面技术》 EI CAS CSCD 北大核心 2013年第5期11-14,28,共5页 Surface Technology
基金 国家"863计划"(2012AA7024034) 710装备预研(A-12-39) 研究生自助探索项目(2013zzts158)
关键词 溶胶-凝胶法 一维光子晶体 反射光谱 sol-gel process 1-D photonic crystal reflectance spectrum
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