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划痕法测定TiAlN涂层结合强度的研究 被引量:18

Study on the Adhesion Strength of a TiAlN Coating by Scratch Tester
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摘要 采用磁控溅射法在不锈钢表面制备了TiAlN涂层,采用压入法及划痕法表征了涂层的结合强度。分析表明,压入法只能作为一种定性的测定方法,该法测得TiAlN涂层的结合强度达到HF3。划痕法结合了声信号、摩擦力信号和划痕微观形貌,可以定量测定结合强度,该法测得在压头曲率半径为200μm的情况下,TiAlN涂层的临界载荷达到13 N,比传统TiN涂层提高了45%。 TiAlN coating was prepared on the surface of stainless steel by magnetron sputtering mothed. Indentation and scratch test was used to investigated the adhesion strength of the coating. Resuhs show that the indentation test is only a qualitative test method, and the adhesion strength measured by indentation test reaches HF3. The results of scratch test show that it is combination of AE signal, frictional force signal and scratch micromorphology. It is a quantitative method for test adhesive strength. When the radius of the Rockwell indenter is 0.2 mm, the critical load of TiAlN coating is 13 N, contrast with the tra- ditional TiN coating, the adhesion strength of TiAlN increased by 45 %.
出处 《表面技术》 EI CAS CSCD 北大核心 2013年第5期107-111,共5页 Surface Technology
基金 国家"863"高新技术研究资助项目(2011AA030101) 湖南省自然科学基金项目(12JJ3038)
关键词 磁控溅射 TIALN涂层 结合强度 magnetron sputtering TiA1N coating adhesion strength
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