基于非成像光学的激光束整形系统的优化设计

Optimization Design Method for Laser Beam Shaping System Based on Optics Non-Imaging

针对衍射型微透镜阵列的激光匀束系统提出一种新的优化设计方法。利用非成像光学中的等能量映射方法,建立了基于Macro宏语言的自定义优化函数。系统采用微透镜阵列和聚光球面镜作为匀光元件,在Zemax软件的序列模式中对微透镜阵列单元的非球面面型进行自动优化,实现了照度均匀性大于90%、能量利用率为83%的6mm×6mm方形光斑的优化设计。采用TracePro光学软件对设计结果进行了仿真验证。此方法无需传统方法复杂的数学计算和器件参数的反复调整,是一种十分有效的微透镜阵列激光匀束系统的设计方法。

A new design method of diffractive microlens array for laser beam uniformity adopting optimization procedure in Zemax is proposed. The custom optimization function in Macro language is created by means of energy mapping in non-imaging optics. A microlens array and a condensing spherical lens are used as the homogenization optical components in the system. The aspheric surface of the lens unit of the microlens array is automatically optimized in sequential mode of Zemax software, and a 6 mm × 6 mm square spot with the irradiance uniformity greater than 90 % and the energy efficiency of 83 % on the target surface is realized. The design results are verified by TracePro simulation program. This method is valid and convenient in the system design of the microlens array for laser beam uniformity, without the need for the complex calculation and the repeating adjustment of the system parameters in the traditional method.