摘要
为了有效解决集束型晶圆制造设备群加工过程中存在的重入调度问题,构建了带重入约束的双集束型晶圆制造设备调度算法.首先分析了双集束型晶圆制造设备中重入约束特征.在此基础上,建立调度问题域,并以系统加工周期最小为目标,建立调度模型.采用分解策略,将双集束型晶圆制造设备调度问题分解成单个设备调度问题,并提出了一种全新的机械手调度顺序搜索的启发式算法.最后对调度算法进行仿真实验分析,结果表明该算法是有效的.
To effectively solve scheduling problems of multi-cluster tools of wafer fabrication system w ith reentrant constraints in running process,a scheduling algorithm w as proposed.Firstly,the characteristics of reentrant constraints of double-cluster tools w ere analyzed.The problem domain of double-cluster tool scheduling w as established and mathematical programming models w ere set up to minimize the system cycle time.The scheduling problems of the doublecluster tools w ere decomposed into scheduling problems of single-cluster tool using the decomposition policy.A novel enlighten algorithm of robotic sequence searching w as presented.Finally,simulation experiments w ere carried out to evaluate the proposed algorithm.The results indicate that the proposed algorithm is valid.
出处
《东北大学学报（自然科学版）》
EI
CAS
CSCD
北大核心
2013年第9期1305-1309,共5页
Journal of Northeastern University(Natural Science)
基金
国家自然科学基金资助项目(61273035
71071115)
关键词
集束型设备群
调度
重入约束
算法
仿真实验
multi-cluster tools
scheduling
reentrant constraints
algorithm
simulation experiments
