一种新型驱动器

A New Type of Piezoelectric Actuator

介绍了一种新型压电驱动器含金属芯压电陶瓷纤维(MPF),推导了MPF的驱动电压与位移关系,运用ABAQUS软件对MPF进行了有限元仿真,并将MPF在不同驱动电压下的位移进行了理论值和仿真值的对比,验证了所推导公式中响应位移和驱动电压关系的正确性。通过实验测试了MPF的迟滞特性,并设计了迟滞逆模型开环控制、迟滞逆模型结合比例、积分和微分(PID)的两种控制方法对MPF进行了迟滞补偿控制。实验表明,复合控制的效果较好,MPF迟滞得到了很好补偿,使输入和输出呈线性,实现了高于10nm的高精度定位。复合控制的实验结果也进一步验证了MPF位移公式的正确性。

A new type of piezoelectric metal core piezoelectric fiber（MPF） actuator is introduced. The relation- ship between voltage and displacement is deducted and finite element simulation is used to ana!ysis MPF. Compara- tive study gives the difference of the displacement between the theory results and the simulation results under differ- ent driving voltage, and verifies the relationship between driving voltage and displacement in the formula. The MPF hysteresis is also test, and two methods are designed to compensate hysteresis control： the inverse hysteresis model of open loop control and the combination of PID. Test shows that the composite control is better with good compen- sation of the MPF hysteresis, and linear input and output. High-precision positioning is realized by higher than the 10 nm. The experimental results of composite control further verify the correctness of the MPF displacement formu- la.