摘要
基于微机电系统(MEMS)技术的薄膜体声波谐振器(FBAR)在无线通讯领域取得了巨大的成功后,由于其具备厚度薄,体积小,与IC兼容及谐振频率和灵敏度都远高于传统的微质量传感器(如石英晶体微天平)等优势,逐渐在微生物分子检测方面崭露头角。由于微生物分子大都生存于液体环境,而纵波模式下FBAR微质量传感器在液体环境中声波损耗大,其品质因数Q值只有3.53。因此,该文在分析了纵波模式下FBAR微质量传感器在气相和液相环境中的特性后,针对液相环境中传感器Q值较低问题,设计了一种具有微通道的FBAR微质量传感器,使其Q值达到30.85,增加了近9倍,从而提升了纵波模式下FBAR微质量传感器对液体中微生物分子检测的性能。
Due to the great success of MEMS-based FBARs in wireless communication, advantages of being thin, small size, compatible with the IC and much higher resonant frequency and more sensitive than traditional mi- cro mass sensor like quartz crystal mierobalance（QCM ）, which have led to further applications as microbial molecu- lar detection sensor in biological and biomedical fields. Most of microbial molecules survive in liquid environment, however, the acoustic loss of the longitudinal wave mode FBAR is larger in liquid environment, Q value is around 3.53. A new compressional wave mode FBAR micro mass sensor used in liquid environment is present. After analy- zing characteristics of longitudinal wave mode FBAR in gas and liquid phase environments, the sensor is designed by embedding a micro fluidic channel on the top of the FBAR to solve the problem of low Q. Simulation shows the new Q value increases to 30.85 which increased by almost 9 times. This advantage can greatly enhance the performance of the sensor for microbial molecular detection.
出处
《压电与声光》
CSCD
北大核心
2013年第5期686-689,693,共5页
Piezoelectrics & Acoustooptics
基金
昆明理工大学MEMS学科建设基金资助项目(14078024)
