W-Sc_2O_3靶材的SPS制备和性能研究

Preparation and Characterization of W-Sc_2O_3 Targets by Spark Plasma Sintering

摘要：采用溶胶凝胶法加二段还原，制备出晶粒直径500～1100nm的亚微米W—Sc2O3粉末，利用放电等离子烧结（spark plasma sintering，SPS）制备了W—Sc2O3靶材．对不同粉末处理条件下的W—Sc2O3烧结体的密度、硬度、表面形貌进行测试研究．结果表明，亚微米尺度的W粉在1300℃即可烧结，远低于常规W粉烧结温度，获得的烧结体相对密度达96．4％、硬度为86．4HRC且Sc元素分布均匀．

The sub-micron sized Sc2O3 doped tungsten powders with the particle size distributed from 500 to 1 100 nm have been fabricated by Sol-Gel methods combined with two-step hydrogen reduction process. The W-Sc2O3 targets have been sintered via spark plasma sintering （SPS） using the obtained sub-micron sized powders pre-treated under different conditions. The comparative density, rockwell hardness, and surface morphology have been studied in this paper. Results indicate that the W-Sc2O3 targets have been successfully sintered at 1 300℃ with the sub-micron sized powders, whose sintering temperature is much lower than that of using micrometer sized powders. The sintered W-Sc2O3 targets with uniformly distribution of Sc have a highly comparative density of 96.4% and rockwell hardness of 86.4 HRC.