硅基磁电阻传感特性测试与分析

Measurement and analysis on the performance of silicon-based magnetoresistive sensors

磁电阻传感器是一类广泛应用的新型磁传感器,具有灵敏度高、体积小、功耗低及易集成的特点。介绍了三种硅基磁电阻传感器的工作原理,包括各向异性磁电阻(AMR)、巨磁电阻(GMR)、隧道磁电阻(TMR)传感器,分析比较了它们的芯片技术参数,并对部分特性参数进行了规范性的测试和分析,得到三种磁传感器的灵敏度、线性度、零漂等特性,为磁传感器应用开发人员设计提供性能参数参考。

Magnetoresitive sensors have been used widely for their small size and high sensitivity, low power consumption and easy integration. Three different silicon-based magnetic sensors are discussed, including AMR, GMR, and TMR magnetic sensor. Their technical parameters are analyzed and compared, and part of parameters of different MR sensors products are given by normative testing including sensitivity, linearity and offset. The real test data is helpful for engineering person to choose components for their design.