人眼安全激光用Er:YAG陶瓷的致密化、显微结构与光学性能

Densification, Microstructure and Optical Property of Er:YAG Ceramics for Eye-safe Laser

以高纯商业Y2O3、α-Al2O3和Er2O3粉体为原料,以TEOS(正硅酸乙酯)和MgO为烧结助剂,采用固相反应和真空烧结技术制备了0.5%Er:YAG透明陶瓷,并对样品的致密化行为、显微结构演化和光学性能进行了系统的研究。结果表明:1760℃烧结的Er:YAG透明陶瓷(保温时间50 h)的结构均匀致密,平均晶粒尺寸约为30μm,几乎没有晶界和晶内气孔。厚度为4 mm的Er:YAG陶瓷样品在1 200 nm处的直线透过率高达83.2%,样品的气孔率低达1.96×10–6。

Transparent 0.5%Er：YAG laser ceramic was fabricated via the solid-state reaction and the vacuum-sintering technique. Commercial Y2O3, a-Al2O3, and Er2O3 powders were used as starting materials. Tetraethoxysilane （TEOS） and MgO were utilized as sintering aids. The densification behavior, the microstructure evolution and the optical properties of the prepared Er：YAG ceramics were investigated. The results show that Er：YAG transparent ceramics vacuum-sintered at 1 760 ℃ for 50h are dense and homogeneous in structure, with the average grain size of 30 tma. For the prepared sample, the grain boundary is clean, and no second phase is observed. For the sample with the thickness of 4mm, the in-line transmittance is 83.2% at 1200 nm. The porosity of the sample is 1.96 × 10^4.