Ti6A14V钛合金真空热氧化组织与性能

Microstructure and property of vacuum thermal oxidation layer of Ti6A14V titanium alloy

对Ti6A14V钛合金进行真空热氧化处理。通过显微组织观察、显微硬度测试、x射线衍射（XRD）及扫描电镜（SEM）分析，研究了该合金氧化层的结构和性能。结果表明，真空热氧化渗氧处理可促进氧向基体扩散，表面形貌出现均匀的凹坑结构，氧化层中的TiO2转变为TiO，表面硬化层中发现有Ti，A1相形成。Ti6A14V钛合金经真空热氧化后表面硬度达600～620HV，硬化层深度可达30“m，膜层组织致密均匀，硬度梯度平缓，耐磨性好。

Ti6A14V titanium alloy was oxidized in vacuum. Microstructure and properties of the oxidized layer were analyzed by optical microscopy, microhardness testing, X-ray diffraction （XRD） and scanning electron microscopy （ SEM）. The results show that vacuum pulse thermal oxidation can promote the diffusion of oxygen into the substrate, the surface exhibits uniformly dimpled morphology, and TiO2 of the oxidation layer is transformed into TiO, the Ti3 A1 phase is found in the hardened layer. After vacuum oxidation, the surface hardness of the Ti6AI4V titanium alloy is in the range of 600 - 620 HV,the thickness of the hardened layer reaches 30 μm. The microstructure of the oxidized layer is uniform and compact, the hardness gradient of oxidized layer is smooth and has higher wear resistance.