无线、无源压力传感器测试及标定方法

Test and Calibration Methods for Wireless Passive Pressure Sensors

针对所制备的微机械无线、无源压力传感器的特点,完成了压力传感器的测试与标定。提出了一种测试与标定方法。以压力控制器输出的压力信号为标准信号源,并利用阻抗分析仪测量传感器谐振频率,克服了传统测试方法复杂、精度低等缺点。通过模拟传感器的工作环境来建立压力传感器标定系统平台,根据压力控制器气压参数和传感器谐振频率参数拟合出压力-频率传输直线方程,结合反函数标定法实现传感器的标定。测试结果表明:该测试与标定的方法简单,适用于大多数无线、无源压力传感器。

For the characteristics of the fabricated wireless, passive micro-mechanical pressure sensor, the test and calibration of the pressure sensor were completed. A kind of test and calibra- tion method was proposed. With the output signal of the pressure controller as a standard signal source, the resonant frequency of the sensor was measured by impedance analyzer, overcoming complexity and low accuracy of the traditional test method. The calibration system of the pres- sure sensor was established by simulating the working environment for the sensor. Based on the gas pressure parameters of the pressure controller and the resonance frequency parameters of the sensor, the pressure-frequency transmission linear equation was fitted and the calibration of the sensor was completed combining with the calibration method of the inverse function. The test re- sults show that the test and calibration method is simple and suitable for most of wireless, passive pressure sensors.