半导体制造中具有重入加工工艺的双臂组合设备的调度研究

Scheduling Analysis of Dual-Arm Cluster Tools with Wafer Revisiting in Semiconductor Manufacturing

解决带重入加工工艺的双臂组合设备的调度问题是非常困难的。如果采用交换策略调度该系统,系统将处于一个3-晶圆周期性调度过程。为改善系统的运行过程及降低生产周期,给出了基于2-晶圆周期性调度方法的调度算法。该算法由解析表达式组成。因此执行非常有效。通过对比3-晶圆和2-晶圆调度方法,可有效的判断两种调度方法的优劣。最后,实例验证该方法的可应用性。

It is very difficuh to solve the scheduling problem of dual-arm cluster： tools with wafer revisiting. If swap strategy is applied, it forms a three wafer periodical proeess with three wafers completed in eaeh period. In order to improve the performance of the system, seheduling algurithms are presented based on 2-wafer eyelic scheduling. The algorithms consist of analytical expressions. Therefore, it is very efficient. Compared with the 2-wafer scheduling by 3-wafer scheduling, it is efficient to cheek which scheduling method is better for the system. Finally, an illustrative example is given to shown the application of the results.