基于丝网印刷法的碱金属热电转换器氮化钛薄膜电极的制备技术

Fabrication of TiN Film Electrode by Screen Printing for Alkali Metal Thermoelectric Converter

采用丝网印刷法在α-Al2O3基底表面分别以三种不同的氮化温度和时间制备了用于碱金属热电转换器AMTEC的氮化钛（TIN）多孔薄膜电极。通过x射线衍射仪对TiN薄膜进行相分析，同时利用扫描电子显微镜SEM观察薄膜表面孔径和孔隙度，采用表面轮廓仪测量了薄膜厚度并且利用电导率仪测量了薄膜方阻。实验结果表明：试样在900～1100℃下氮化2—4h，都可生成择优取向（200）为主的TiN薄膜；TiN薄膜平均孔径随氮化温度增加而减小，孔隙度随着氮化时间增加而增加；随着氮化温度的升高，电导率和氮化时间的关系由正相关向负相关转变；在1100℃下氮化2h可以得到电性能较好的TiN多孔薄膜电极，其电导率为1．43×105S·m-1。

The porous TiN films, as the electrode material of the alkali metal thermoelectric converter（AMTEC）, were deposited by screen printing on α-Al2O3 substrate. The influence of the deposition conditions was evaluated. The TiN film was characterized with X-ray diffraction, scanning electron microscopy, and conventional surface probes. The results show that nitridized at a temperature ranging from 900℃ to 1000℃ for 2 - 4 h, the TiN phase dominated the porous films with （200） as the preferential growth orientation. As the ru＇tridation temperature increased, the average pore size decreased but the porosity increased. The conductivity depends on the nitridation temperature and time. For instance, an increase of the nitridation time resulted in an increase of the conductivity at 900℃ ; a decrease-increase of conductivity at 1000℃, and a decrease of conductivity at 1100℃, respectively.