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Evaluation of Two Si Layers Simultaneously Crystallized LTPS-TFT Memory by the Green Laser Irradiation

Evaluation of Two Si Layers Simultaneously Crystallized LTPS-TFT Memory by the Green Laser Irradiation
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出处 《材料科学与工程(中英文B版)》 2013年第6期375-378,共4页 Journal of Materials Science and Engineering B
关键词 激光照射 一次结晶 硅层 闪速存储器 内存 评估 A-SI 准分子激光器 Low temperature poly-Si thin film transistor, flash memory, laser crystallization.
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参考文献7

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