原子层沉积方法制备核-壳型纳米材料研究

Study on atomic layer deposition preparation of core-shell structured nanometer materials

采用原子层沉积方法在碳黑纳米颗粒表面分别沉积Al2O3,ZnO,TiO2和Pt,成功制备出核-壳型纳米材料.通过高分辨率透射电子显微镜、X射线光电子能谱仪、能谱仪对材料的表面形貌、晶体结构、薄膜成分进行了表征和分析.结果表明,原子层沉积方法是制备核壳型纳米材料的理想方法.此外,还分析了采用原子层沉积方法沉积不同材料,所生长的薄膜材料有单晶、多晶、非晶等多种存在形式的形成原因.

Monocrystal Pt nanoparticles, amorphous Al2O3 thin film, polycrystalline ZnO and TiO2 thin films were fabricated on black carbon nanoparticles by means of atomic layer deposition （ALD）. Using high resolution transmission electron microscopy （HRTEM）, X-ray photoelectron spectrometer （XPS）, energy dispersive spectroscopy （EDS）, We have characterized and analyzed the surface morphology, crystal structure and composition of the ranopasticles and thin filins. Results indicate that the ALD method is an ideal method to prepare core-shell stuctured nanometer materials. In addition, the reasons why the formation of ALD films with different crystal morphologies, such as monocrystal, amorphous, polycrystalline, were discussed.