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凝胶注模法制备氧化铝基片常见微观缺陷分析 被引量:1

The Common Micro-Defects Analysis on Preparation of Alumina Substrate by Gelcasting
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摘要 氧化铝陶瓷在成型、烧成以及机加工等过程中都会或多或少的产生一些微观缺陷,分析了几类常见微观缺陷,提出避免缺陷产生的相关措施。 During the molding,sintering and machining process,various micro-defects often appear,several kinds of common defects of alumina ceramic substrates prepared by gelcasting were described,and relevant measures were put forward.
出处 《真空电子技术》 2013年第4期64-68,共5页 Vacuum Electronics
关键词 微观缺陷 团聚 气孔 微裂纹 夹杂物 Microdefect Reunion Agglomeration Pore Micro-crack Inclusion
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