摘要
本文研究了一个已建成的温度精度控制要求为±0.1℃并达到百级净化要求的实验室,指出针对这类同时具有温度控制和洁净度要求的实验室应采用的空调设计方法和自动控制的关键技术措施,希望能够为类似工程的设计、建设等提供相应的参考。
Studies a 100 class clean room built with ±0.1℃ temperature control requirements, recommends the key technical measures taken about air handling system design and automatic control in order to achieve the temperature control and cleanliness requirements, expecting appropriate reference provided for similar project design and construction.
关键词
±0
1℃
百级净化
多级稳定
自控设备
±0．1℃
100 class clean room
multi-level stability
automatic control equipment.
