摘要
介绍了椭偏仪实验装置及实验调整的不足对薄膜参数测量的影响,制作了小孔光阑和可调位移平台,对光接收和实验调整做了改进,给出了改进的实验调整和实验测量方法,改进后的实验调整简单易调,测量精度得到提高.
The influence of the ellipsometer and the shortage of adjustment on the measure-ment of the thin film parameters has been discussed. A small aperture and an adjustable object stage have been designed. The optical receiver and experimental adjustment have been im-proved. With all these modifications, a much more accurate adjusting and measuring method with relatively easy operation procedures has been proposed.
出处
《物理与工程》
2013年第5期42-44,50,共4页
Physics and Engineering
关键词
椭偏仪
载物台
等幅椭圆偏振光
光接收器
ellipsometer
object stage
elliptically polarized light with equal amplitude
opti-cal receiver
