TFT-LCD制程中Zara点状不良的产生与改善研究

Occurrence and Improvement of Zara Particle in TFT-LCD Cell Process

研究了TFT-LCD制造工艺中产生Zara Particle的影响因素。采用Mac/Mic,SEM,EDX等检测设备,对Zara点状不良进行了大量的实验测试、数据分析和理论研究工作,对其产生的原因提出了两种不同的理论观点。通过调整聚酰亚胺薄膜厚度和摩擦工艺参数等一系列措施,产品质量得到了很大的提高,Zara点状不良从改善前的21.2%降低到1.69%,大大提高了产品良率,为以后相关问题的研究奠定了一些理论基础。

The reason for producing Zara particle in TFT-LCD manufacture process was studied. To solve this difficult point, the experimental tests and data analysis were carried out through macroscopic and microscopic inspection, scanning electron microscope, energy dispersive xray spectrom, etc. Two different viewpoints were put forward. The quality of product is improved by adjusting polyimide thickness, rubbing technological parameter and other measures. The ratio of Zara particle is reduced from 21.2% to 1.69%. Product yield has been greatly improved, and the above-mentioned results provide valuable data and theory basis for related issues in the future.