基于两步法超精密圆度仪误差分离系统

Ultra-Precision Roundness Error Separation System Based on the Two-Step Separation Method

基于两步法误差分离原理的圆度仪误差分离系统 ,克服了传统的“多步法”分离过程中存在的“谐波抑制问题”,缩短了分离时间 ,有效地抑制了分离过程中引入的测量噪声及系统漂移的影响。该装置不仅可以使圆度仪主轴回转误差从被测工件测量结果中可靠分离 ,而且整个测量过程实现了全自动无人操作 。

A roundness measurement system based on the two-step error separation technology is presented in this paper. This system overcomes the harmonious restrain that exists in the traditional mutil-step separation method, shortens the measurement time, efficiently reduces the noise introduced during the separation process and restrains the influence of the system excursion. This instrument can reliably separate the system rotary error from the measurement data,and realize completely the measurement automation without any human operation during the process, thus it improves the reliability and anti-noise ability of the system.