射频感应耦合低压等离子体特性分析

Analysis on Characteristic of Inductively Coupled low-Pressure Plasma

采用光谱诊断法和Langmuir单探针法对射频感应耦合Ar气等离子体特性进行分析。通过光栅光谱仪研究了低气压下Ar气等离子体的光谱强度的变化特性,采用Langmuir单探针法测量不同条件下电子密度和电子温度。等离子体发射光谱的光谱强度随着气压和功率的增加而增强,射频功率对光谱强度的影响较明显。当功率从120W增加到180W时,光谱强度将会迅速增加,等离子体发生E模向H模的模式转换。Langmuir单探针法测量的电子密度和电子温度在的变化规律符合E模向H模转换的变化规律。

The author use spectral diagnostics and Langmuir single probe to analyze emission spectrum characteristic of RF inductively coupled Ar gas plasma.Giving study on discharge characteristic of low-pressure Ar gas inductively coupled plasma （ICP） by the grating spectrometer,using Langmuir single probe to measure variation of electron density and electron temperature in different conditions,the spectral intensity of plasma atomic emission spectrometry will be increased as the increases in pressure and power,and the affect of power to spectrum is more obvious.The spectral intensity will increase rapidly,when the power increases from 120W to 180w.As the reason may be that plasma mode has a sudden change in some RF power,as in plasma the E-mode change to H-mode.Using Langmuir single probe to measure variations of electron density and electron temperature,is in line with the feature of conversion from E-mode to H-mode.