X射线干涉仪中单晶硅微动工作台的研制

High-accuracy Silicon Translation Stage for X-ray Interferometry

目前国际上 X射线干涉仪所采用的微动工作台均采用对称式柔性铰链结构 ,其缺点是侧滑角大 ,严重影响干涉信号的对比度 ,很容易产生干涉条纹的记数误差。为此提出了非对称结构微动工作台的设计思想 ,并引入有限元方法进行了结构参数优化 ,研制了整体式 X射线干涉仪。理论分析和实验表明 :利用非对称结构研制的 X射线干涉仪 ,分析器的侧滑角显著下降 ,干涉信号的对比度大大提高 ,更适合

Traditional X ray interferometer normally use symmetrical translation stage It causes large yaw angle of analyzer ,this seriously influences the contrast of x ray interference signal.An unsymmetrical structure of translation stage is presented and the parameters of the stage are optimized by FEM.The theoretical and experimental results show that the properties of the new translation stage are improved and it is more suitable for nanometer measurement of X ray interferometer.