射频气体放电激励电压电流及相位传感器的研制

The Probe Measuring Voltage,Current and the Phase Angle of RF Discharges

由于分布电容的存在而造成对测量仪器的干扰 ,使得对射频放电电压电流及相位的测量 ,到目前为止仍然是比较困难和昂贵的 ;使用简单的电压电流探头而无干扰地精确地测量出电压、电流和相位角 ,从而计算出复合阻抗几乎是不可能的。这里介绍一种自行研制的传感器 ,结合网络分析理论 ,采用数字与计算机技术实现对射频放电电压、电流及相位角精确的测量 ,经实际使用精度高 ,抗干扰能力强 。

The retiable measurement of voltage, current and phase angle at RF discharge is difficult and more expensive up to now due to interference in the measuring equipment and parasitic capa citance. Using conventional voltage and current probes it is not possible to exclude disturbing signals and measure the phase angle as precise as necessary to calculate the complex impedance from these quaritities. A probe measuring RF voltdge,current and the phase of our homemade is presented in this paper, it has some advantages of high precision,high protecting interference and less expensive.