超薄AAO模板法辅助生长高密度有序金纳米点阵列

Fabrication of High-Density and Ordered Au Nanodot Arrays by Ultra-Thin Anodic Aluminum Oxide (AAO) Membranes

在高真空状态下采用孔径为40 nm的超薄阳极氧化铝(AAO)模板作为掩膜进行金的热蒸镀,制备了平均粒径为35.5 nm、填充密度为1.45×1010cm-2的金纳米点阵列.探索了高密度有序纳米点阵列的制备工艺.通过扫描电子显微镜(SEM)和原子力显微镜(AFM)对金纳米点阵列进行表面形貌表征,证明超薄AAO模板法明显改善了金纳米点阵列分布的尺寸均匀度和有序度.

High-density Au nanodot arrays have attracted a lot of interests because of their potential applications in catalyst and biosensor. This article focused on the research of the manufacture of high-density and well-ordered Au nanodot arrays with size of 40 nm ultra-thin Anodie Aluminum Oxide （AAO） membrane （ the result of our experimental exploration） being the mask. Well-ordered Au nanodot arrays have fabricated by high-vacuum Au thermal evaporation with the help of AAO masks bonded on the desired substrates. The diameters of Au nanodots have been highly controlled with 35.5 nm, the packing-density could achieve to as high as 1.45 ×10^11 cm^-2. The morphology of the Au nanodot arrays has been investigated by the SEM and AFM. The SEM images confirmed that the uniformity of the size distribution and structural ordering of Au nanodot arrays had been improved by the two-step anodization of AAO.