几种用于i-线光致抗蚀剂的光产酸剂性能研究

Study on several photoacid generators for i-line photoresists

2,1,4-重氮萘醌磺酸酯类化合物(2,1,4-DNQ),在光照下除了发生传统的重氮萘醌磺酸酯的光解,还可以产生磺酸导致聚合物发生酸解,因而可用作光产酸剂.本文制备了5种2,1,4-重氮萘醌磺酸酯,具有较好的热稳定性,分解温度均在130℃以上;其中有两种2,1,4-重氮萘醌磺酸酯(PAG-1和PAG-5)的溶解性良好,可溶于光致抗蚀剂体系所用的常用溶剂,且二者的光解效率较高,可用作i-线光致抗蚀剂的产酸剂使用.

It has been reported that 2,1,4 - diazotization naphthalene acid ester consignment （2,1,4-DNQ）can be photochemically transformed to 3-sulfoindenecarboxylic acid, which can result in the decomposition of the acid labile group. 5 kinds of 2,1,4-DNQ have been produced, but only two（ PAG-1和PAG-5 ） of them are better soluble in common solvents,which can be used as photoacid generators （PAG） of i-line photoresists.