基于直线位移传感器的机械手柔性控制

Flexible Control for Manipulator Based on Linear Displacement Transducer

在双极性功率半导体器件如晶闸管的制造工艺中,需要对经过激光割圆工艺切割后的芯片进行喷砂整形,以符合后续工艺对外观形状的精密要求,目前工艺中使用的喷砂设备的喷嘴进给系统均采用手动丝杆调节,难以保证加工的一致性和精度要求。现采用直线位移传感器作为进给位置反馈元件,伺服系统作为执行机构,应用自动控制理论,设计包含速度控制内环和位移控制外环的双闭环机械手系统,该系统能采样并模拟人工连续进给柔性操作过程,实现工艺过程的智能化,提高了产品的加工制造水平。

In the manufacturing process of bipolar power semiconductor devices such as thyristors, the wafer after the treatment of laser-cutting process should be processed the sandblasting shaping, in order to comply with the appearance and shape precision requirements of the following process. The current nozzle feed systems of the sandblasting equipment in the process used manual screw regulator, which is difficult to guarantee the processing consistency and accuracy requirements. The newly designed control system used the linear displacement transducer as position feedback element and the servo system as actuator, and the double closed-loop manipulator system including speed control inner loop and displacement control external loop based on automatic control theory. The system can sample and simulate the manual continuous feeding flexible operation process and implement intelligent process and improve the level of power semiconductor product manufacturing.