摘要
对加速发展我国IC专用设备提出建议 ,即提高认识、引进样机、先易后难、寻找突破和联合多方。
A proposal for the accelerative development of China's IC manufacturing eguipment is advanced,deepening the understanding, introducing the foreign equipment,doing the easier before doing the harder,seeking a breakthrough point,and uni￣ting the parties concerned as much as possible.
出处
《电子工业专用设备》
2000年第4期1-4,共4页
Equipment for Electronic Products Manufacturing
关键词
专用设备
集成电路
半导体工艺
Development
IC
Manufacturing equipment
Proposal
