压电-电流变平面二维步进式驱动器

Piezoelectric-electrorheological Planar Stepper Motor

首次提出了一种利用压电效应和电流变效应相结合的新型平面步进式驱动器。研制的驱动器包括 4个提供驱动力和产生位移的多层压电致动器 ,以及 4个用来箝位的电流变箝位器。根据仿生运动模式 ,箝位器与压电致动器采用不同的运动组合 ,可分别实现沿 x向或 y向的蠕动式步进运动。实验结果显示 ,平面步进驱动器样机在 x向和 y向都能灵活运动 ,并具有大行程和低于 0 .1μm的高的分辨率特性。驱动器的最高步进速度为 6 m m/min,最大承载能力为 1.70 N。

A new type of piezoelectric electrorheological(ER)planar stepper motor based on piezoelectric effect and electrorheological effect was proposed firstly in this paper.The prototype motor has four piezoelectric actuators for producing force and displacement and four ER clamps for clamping position on a base plate.While the ER clamps are combined with piezo actuators in different way,the movement of the motor in x diection or y direction on the base plate can be obtained according to a bionic motion mode.Experimental results showed that the prototype planar motor steps nimbly both in x direction and y direction with large travel range and high resolution over 0.1 μm.The maximum s tepping speed of 6 mm/min and maximum load of 1.70 N were observed in experiments.