摘要
对双通道光强反射式光纤位移传感器测量系统进行了优化设计。测量结果表明 ,所构成的装置重复性达到 0 .6% ,最小分辨率小于 1.0 μm ,测量范围为 2 .0mm。测量系统采用 8位单片机处理数据 ,用三次插值多项式校正传感器输出信号的非线性 ,获得良好效果 ,以数字方式显示位移的测量结果。系统充分利用了传感器输出特性无“光峰”现象的特点 ,信号处理过程快捷 ,此系统对变化不太快的位移可进行实时测量。
A setup of measuring system is optimally designed,which consists of a two-channel fiber optic displacement sensor based on light reflection.The experiment results show that the repeatability of the setup is 0.6 %,with the minimum resolution of below 1.0 μm,and the measuring range of 2.0 mm.A 8-bit monolithic microcomputer is utilized to process the measuring data.The nonlinear-ity of the output of the sensor on the displacement being measured is linearized in a cubic multinomial,the effect is ideal.The result of measurement is displayed digitally.The characteristics of the output of the sensor are taken into full play,so that the signals are processed quickly.The setup may be used to make real-time measurement of the displacement which changes relatively slow.
出处
《半导体光电》
CAS
CSCD
北大核心
2000年第6期414-417,共4页
Semiconductor Optoelectronics
关键词
光纤传感器
位移
实时测量系统
fiber optic sensor
displacement
real-time measurement