摘要
介绍了基于“魔镜”技术原理研制的镜面无损检测系统。该检测系统已应用于Si片和其他半导体抛光晶片的质量检测 ,且其用途已延伸到与超平镜面有关的各种技术领域 ,如硬盘、光盘、玻璃衬底等。
A mirror-like surface non-destructive inspection system manufactured based on the principle of “Makyoh” technology is introduced.This inspection system has recently been applied to evaluate Si wafers and other polished semiconductor wafers.The application has extended to various technological fields related to super-flat mirror surfaces,such as hard discs,optical discs,and glass substrates,etc.
出处
《半导体光电》
EI
CAS
CSCD
北大核心
2000年第6期425-427,共3页
Semiconductor Optoelectronics
关键词
魔镜技术
镜面
无损检测
半导体晶片
Makyoh technology
mirror-like surface
non-destructive inspection
semiconductor wafer
