小孔径超精测量方法的研究

Research on the ultra precision measuring method of diameter of small aperture

孔径的超精测量 ,一直是长度计量中的难点。本文提出一种采用双频激光干涉技术和微位移微瞄准技术实现的小孔孔径超精测量系统 ,可在 8～ 5 0mm的范围内实现 0 0 1μm的分辨力和 0 1μm的测量精度 ,为国际领先水平。该方法已成功应用在惯性仪表零件孔径及垂直度的超精测量中 ,达到了满足的效果。

A new method for ultra precison measurement of small aperture using double frequency laser technique,micro displacement and micro aiming technique was presented in this paper and the resolution over 0.01μm and the accuracy over 0.1μm was obtained in the range(8-50)mm.This method was well used in the ultra precision diameter measuring system of instrament part.