郎穆尔探针低温低压等离子体诊断

Signal Filtering of Low-Temperature Low-Pressure Plasma Diagnosed with Langmuir Probe

基于Orbital Motion Limit(OML)离子收集理论,建立了等离子体参数与朗缪尔探针电流、电压之间的函数关系。将MATLAB作为编程工具,编制计算程序,采用多重滤波方法消除朗缪尔探针对等离子体产生的干扰。分析不同滤波方法对探针电流、电子电流、电子电流的一阶和二阶微分等朗缪尔探针诊断数据滤波的影响,与自行设计的数字实验结果进行对比,选择最优滤波方法,以提高朗缪尔探针的诊断精度。

We addressed the data processing of the signals in diagnosing a low-temperature, low-pressure plasma with Langmuir probe. The correlation between the plasma properties and the measured current and voltage, with Langmuir probe,was evaluated, based on the Orbital Motion Limit （OML） ion collection theory. A novel multi-digital-filter technique,developed on the basis of MATLAB, was proposed to minimize the possible interference originated from Langrnuir probe. The impacts of the different filtering techniques on the data acquired, including the probe current, electron current, and the 1st and 2nd derivatives of the electron current, were calculated to optimize the filtering method and to enhance the accuracy in plasma diagnosis with Langrnuir probe.